{"id":45,"date":"2026-09-19T02:18:15","date_gmt":"2026-09-19T02:18:15","guid":{"rendered":"http:\/\/127.0.0.1:8386\/?p=45"},"modified":"2026-09-22T09:10:22","modified_gmt":"2026-09-22T09:10:22","slug":"etch-silicon-evolution-en","status":"publish","type":"post","link":"https:\/\/zjsilicon.com\/insights\/etch-silicon-evolution\/","title":{"rendered":"\u4ece\u9676\u74f7\u5230\u5355\u6676\u7845\uff1a\u523b\u8680\u7845\u90e8\u4ef6\u6750\u6599\u7684\u6280\u672f\u6f14\u8fdb"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"45\" class=\"elementor elementor-45\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f790a22 e-con-boxed e-no-lazyload e-flex e-con e-parent\" data-id=\"f790a22\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-0097ee4 e-con-full e-flex e-con e-child\" data-id=\"0097ee4\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div class=\"elementor-element elementor-element-30e4bca e-con-full zj-ref-category is-active e-flex e-con e-child\" data-id=\"30e4bca\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-26f9a10 elementor-view-stacked elementor-shape-circle elementor-widget elementor-widget-icon\" data-id=\"26f9a10\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-icon-wrapper\">\n\t\t\t<a class=\"elementor-icon\" href=\"http:\/\/43.159.61.132\/insights\/etch-silicon-evolution\/\">\n\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-far-file-alt\" viewBox=\"0 0 384 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M224 136V0H24C10.7 0 0 10.7 0 24v464c0 13.3 10.7 24 24 24h336c13.3 0 24-10.7 24-24V160H248c-13.2 0-24-10.8-24-24zm64 236c0 6.6-5.4 12-12 12H108c-6.6 0-12-5.4-12-12v-8c0-6.6 5.4-12 12-12h168c6.6 0 12 5.4 12 12v8zm0-64c0 6.6-5.4 12-12 12H108c-6.6 0-12-5.4-12-12v-8c0-6.6 5.4-12 12-12h168c6.6 0 12 5.4 12 12v8zm0-72v8c0 6.6-5.4 12-12 12H108c-6.6 0-12-5.4-12-12v-8c0-6.6 5.4-12 12-12h168c6.6 0 12 5.4 12 12zm96-114.1v6.1H256V0h6.1c6.4 0 12.5 2.5 17 7l97.9 98c4.5 4.5 7 10.6 7 16.9z\"><\/path><\/svg>\t\t\t<\/a>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f97089d elementor-widget__width-auto elementor-align-center elementor-widget elementor-widget-button\" data-id=\"f97089d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"http:\/\/43.159.61.132\/insights\/etch-silicon-evolution\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Evolution of Silicon Etch Components<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-2b7464c e-con-full zj-ref-category e-flex e-con e-child\" data-id=\"2b7464c\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-19552ce elementor-view-stacked elementor-shape-circle elementor-widget elementor-widget-icon\" data-id=\"19552ce\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon.default\">\n\t\t\t\t\t\t\t<div class=\"elementor-icon-wrapper\">\n\t\t\t<a class=\"elementor-icon\" href=\"http:\/\/43.159.61.132\/insights-en\/\">\n\t\t\t<svg aria-hidden=\"true\" class=\"e-font-icon-svg e-fas-download\" viewBox=\"0 0 512 512\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"><path d=\"M216 0h80c13.3 0 24 10.7 24 24v168h87.7c17.8 0 26.7 21.5 14.1 34.1L269.7 378.3c-7.5 7.5-19.8 7.5-27.3 0L90.1 226.1c-12.6-12.6-3.7-34.1 14.1-34.1H192V24c0-13.3 10.7-24 24-24zm296 376v112c0 13.3-10.7 24-24 24H24c-13.3 0-24-10.7-24-24V376c0-13.3 10.7-24 24-24h146.7l49 49c20.1 20.1 52.5 20.1 72.6 0l49-49H488c13.3 0 24 10.7 24 24zm-124 88c0-11-9-20-20-20s-20 9-20 20 9 20 20 20 20-9 20-20zm64 0c0-11-9-20-20-20s-20 9-20 20 9 20 20 20 20-9 20-20z\"><\/path><\/svg>\t\t\t<\/a>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a37b29a elementor-widget__width-auto elementor-align-center elementor-widget elementor-widget-button\" data-id=\"a37b29a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"http:\/\/43.159.61.132\/insights-en\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Technology &amp; Applications<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-8737494 e-con-boxed e-no-lazyload e-flex e-con e-parent\" data-id=\"8737494\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b8e73d0 elementor-widget__width-auto elementor-widget elementor-widget-heading\" data-id=\"b8e73d0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">From Ceramics to Monocrystalline Silicon: The Evolution of Etch Components<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-141db9d elementor-widget__width-auto elementor-widget elementor-widget-text-editor\" data-id=\"141db9d\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Technical Insight<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-013cf08 e-con-boxed e-no-lazyload e-flex e-con e-parent\" data-id=\"013cf08\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-24a74df elementor-widget elementor-widget-text-editor\" data-id=\"24a74df\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Selecting materials for etch-chamber components requires consideration of electrical characteristics, crystal structure, surface loss and each part&#8217;s role. Ceramics, polycrystalline silicon and monocrystalline silicon suit different conditions and bring different process considerations.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-a2c884c e-con-full e-flex e-con e-child\" data-id=\"a2c884c\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-277fe7c elementor-widget elementor-widget-heading\" data-id=\"277fe7c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">From Ceramics to Silicon-Based Materials<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8e7c758 elementor-widget elementor-widget-text-editor\" data-id=\"8e7c758\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Ceramics offer insulation and temperature resistance for insulating and structural equipment parts. Functional components close to the wafer also require evaluation of electrical response, thermal expansion and process compatibility.<\/p><p>Silicon components share the same base element as silicon wafers, offering another approach to electrical and material compatibility. Selection is based on component location, function and process conditions, rather than replacing all ceramics with silicon.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-827e202 e-con-full e-flex e-con e-child\" data-id=\"827e202\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-0a06ae6 elementor-widget elementor-widget-heading\" data-id=\"0a06ae6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Polycrystalline vs. Monocrystalline Structure<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a709b6b elementor-widget elementor-widget-text-editor\" data-id=\"a709b6b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Polycrystalline silicon contains multiple grains separated by grain boundaries. Under plasma exposure and thermal cycling, loss and stress near boundaries may differ from those within grains. Surface roughening, particles and long-term loss therefore require attention.<\/p><p>Monocrystalline silicon has a continuous crystal structure without these grain boundaries. This distinction matters where consistent surface loss is important. It does not mean zero particles: raw materials, machining, cleaning and operating conditions still affect performance.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-8411513 e-con-full e-flex e-con e-child\" data-id=\"8411513\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-5064c61 elementor-widget elementor-widget-heading\" data-id=\"5064c61\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Silicon Components in Etch Equipment<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c8b5c64 elementor-widget elementor-widget-text-editor\" data-id=\"c8b5c64\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p><strong>Focus rings and other silicon rings<\/strong>: Parts around the wafer whose geometry, electrical properties and wear are important process factors.<\/p><p><strong>Silicon electrodes and showerheads<\/strong>: Depending on equipment design, these support electrical coupling or gas distribution. Material, resistivity, hole locations and surface requirements must be confirmed separately.<\/p><p><strong>Silicon liners<\/strong>: Chamber components whose fit, surface condition and process compatibility must be confirmed against equipment requirements.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-54beb82 e-con-full e-flex e-con e-child\" data-id=\"54beb82\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-f0d4bd5 elementor-widget elementor-widget-heading\" data-id=\"f0d4bd5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Material Selection &amp; Process Validation<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-91c55a5 elementor-widget elementor-widget-text-editor\" data-id=\"91c55a5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Confirm the application and delivery form before discussing material and geometric parameters. Ingots, cylinders and rings follow different machining routes. Conductivity type, resistivity, oxygen and carbon content, and dimensions must be specified in drawings and technical agreements.<\/p><p>Dimensional tolerance, flatness and roughness are separate requirements; one cannot substitute for all surface-quality criteria. Machined surfaces, appearance inspection and packaging must suit subsequent operations.<\/p><p>Application validation remains necessary after material selection. Evaluate particles, etch uniformity, wear and maintenance intervals against equipment requirements to establish acceptance criteria for the specific process.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-de5c308 elementor-widget elementor-widget-image\" data-id=\"de5c308\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1448\" height=\"1086\" src=\"https:\/\/zjsilicon.com\/wp-content\/uploads\/2026\/09\/ring.webp\" class=\"attachment-full size-full wp-image-515\" alt=\"\u7845\u6750\u6599\u89c6\u89c9\u5f62\u8c61\" srcset=\"https:\/\/zjsilicon.com\/wp-content\/uploads\/2026\/09\/ring.webp 1448w, https:\/\/zjsilicon.com\/wp-content\/uploads\/2026\/09\/ring-300x225.webp 300w, https:\/\/zjsilicon.com\/wp-content\/uploads\/2026\/09\/ring-1024x768.webp 1024w, https:\/\/zjsilicon.com\/wp-content\/uploads\/2026\/09\/ring-768x576.webp 768w\" sizes=\"(max-width: 1448px) 100vw, 1448px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-4187647 e-con-boxed e-no-lazyload e-flex e-con e-parent\" data-id=\"4187647\" data-element_type=\"container\" data-e-type=\"container\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t<div class=\"elementor-element elementor-element-e028eec e-con-full e-flex e-con e-child\" data-id=\"e028eec\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t<div class=\"elementor-element elementor-element-da49ecb e-con-full e-flex e-con e-child\" data-id=\"da49ecb\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-421fe95 elementor-widget elementor-widget-heading\" data-id=\"421fe95\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Technical Consultation &amp; Custom Requirements<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e1d91a0 elementor-widget elementor-widget-text-editor\" data-id=\"e1d91a0\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t\t\t\t\t\t<p>Please provide the product form, drawings, conductivity type, resistivity and delivery requirements.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t<div class=\"elementor-element elementor-element-201c557 e-con-full e-flex e-con e-child\" data-id=\"201c557\" data-element_type=\"container\" data-e-type=\"container\">\n\t\t\t\t<div class=\"elementor-element elementor-element-1cf018a elementor-widget__width-auto elementor-widget elementor-widget-button\" data-id=\"1cf018a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"button.default\">\n\t\t\t\t\t\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-sm\" href=\"http:\/\/43.159.61.132\/contact-en\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Submit Requirements \u203a<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"","protected":false},"author":0,"featured_media":224,"comment_status":"closed","ping_status":"open","sticky":false,"template":"elementor_header_footer","format":"standard","meta":{"footnotes":""},"categories":[7],"tags":[],"class_list":["post-45","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized-en"],"_links":{"self":[{"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/posts\/45","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/types\/post"}],"replies":[{"embeddable":true,"href":"https:\/\/zjsilicon.com\/?rest_route=%2Fwp%2Fv2%2Fcomments&post=45"}],"version-history":[{"count":2,"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/posts\/45\/revisions"}],"predecessor-version":[{"id":734,"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/posts\/45\/revisions\/734"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/zjsilicon.com\/?rest_route=\/wp\/v2\/media\/224"}],"wp:attachment":[{"href":"https:\/\/zjsilicon.com\/?rest_route=%2Fwp%2Fv2%2Fmedia&parent=45"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/zjsilicon.com\/?rest_route=%2Fwp%2Fv2%2Fcategories&post=45"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/zjsilicon.com\/?rest_route=%2Fwp%2Fv2%2Ftags&post=45"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}